Galvanic Etching of Silicon
For fabrication of micromechanical structures
- Imprint
- Delft University Press
- Author
- Ashruf, C.
- Pub. date
- January 2000
- Pages
- 166
- Binding
- softcover
- ISBN
- 978-90-407-2001-7
- Subject
- Biochemistry, Molecular, Cell, Geosciences
€32 / US$39
Excl. VAT