Atomistic simulation of Cu/Ta thin film deposition and other phenomena
- Imprint
- Delft University Press
- Author
- Klaver, P.
- Pub. date
- January 2004
- Pages
- 94
- Binding
- softcover
- ISBN
- 978-90-407-2526-5
- Subject
- Applied Physics, Physics
€25 / US$36
Excl. VAT